Pr. Menge et Me. Cuneo, QUANTITATIVE CLEANING CHARACTERIZATION OF A LITHIUM-FLUORIDE ION DIODE, IEEE transactions on plasma science, 25(2), 1997, pp. 252-257
An ion source cleaning testbed was created to test plasma-cleaning tec
hniques, and to provide quantitative data on plasma-cleaning protocols
prior to implementation on the SABRE accelerator, The testbed was des
igned to resolve issues regarding the quantity of contaminants absorbe
d by the anode source (LiF), and the best cleaning methodology, A test
chamber was devised containing a duplicate of the SABRE diode. Radio-
frequency (RF) power was fed to the anode, which was isolated from gro
und and thus served as the plasma discharge electrode. RF plasma disch
arges in 1-3 mtorr of Ar with 10% O-2 were found to provide the best c
leaning of the LiF surface, X-ray photoelectron spectroscopy (XPS) sho
wed that the LIF could accrue dozens of monolayers of carbon just by s
itting in a 2 x 10(-5) vacuum for 24 h. Tests of various discharge cle
aning protocols indicated that 15 min of an Ar/O-2 discharge was suffi
cient to reduce this initial 13-45 monolayers of carbon impurities to
2-4 monolayers, Rapid recontamination of the LiF was also observed, Up
to ten monolayers of carbon returned in 2 min after termination of th
e plasma discharge and subsequent pumping back to the 10(-5) torr rang
e, Heating of the LiF also was found to provide anode cleaning. Applic
ation of heating combined with plasma cleaning provided the highest cl
eaning rates.