Isolated three-dimensional (3D) silicon mounds on the Si(111)(7 x 7) surfac
e have been produced using the tip of a scanning tunneling microscope (STM)
at temperatures between 700 K and 750 K. Thermal relaxation processes of t
he mounds have been investigated by a temperature-variable STM. The 3D moun
ds formed by the STM tip are like pyramids with certain facets for both sur
faces. The indices of the main facets of the mounds on the Si(111) surface
are {311}, and those of the small facets are {221} or {331}. Two types of p
yramids are produced on the Si(111). The pyramids with a production probabi
lity of 75% are normal stacking at the interface between the mound and the
substrate, and are called type U. For mounds with a production probability
of 25% which are in the twin relation of the type U mounds, there is a stac
king fault at the interface, and they are called type F. The formation ener
gy of the stacking fault is estimated from the ratio of the production prob
ability as 4.7 meV/Angstrom (2). The decay rate of the type F mounds is abo
ut three times larger than that of the type U ones. During decomposition of
the type U mounds, the facets of the pyramid are split into two parts. For
the type F mounds, the pyramids decay nearly layer by layer without splitt
ing of the facets and step bunching.