Effect of the driving frequency on the emission characteristics of a radio-frequency glow discharge excitation source boosted by the introduction of a d. c. bias current
K. Wagatsuma et H. Matsuta, Effect of the driving frequency on the emission characteristics of a radio-frequency glow discharge excitation source boosted by the introduction of a d. c. bias current, ANAL SCI, 17(2), 2001, pp. 313-318
In a radio-frequency-powered glow discharge lamp, a d.c. bias current which
is driven by a self-bias voltage can lead to an enhancement of the emissio
n intensities excited by the plasma. The driving frequency of the r.f. plas
ma is an important parameter to determine the self-bias voltage; lower r.f.
frequencies induce greater self-bias voltages. The effects of the bias cur
rent introduction on the emission characteristics were compared between a 1
3.56-MHz plasma and a 6.78-MHz plasma. As a result, the 6.78-MHz plasma off
ered a better analytical performance, probably due to higher self-bias volt
ages, if the introduced Ar pressure was optimized. This method was applied
to a Mo determination in Fe-matrix alloy samples. At bias currents of 40 -
50 mA, the emission intensities of the Mo I 379.82-nm line were about 10-ti
mes larger than those obtained with the conventional plasma when the 6.78-M
Hz plasma was produced at an r.f. power of 60 W. The detection limit obtain
ed for this calibration was 2.0 x 10(-4) mass % Mo at an 80-W r.f. power an
d at a d.c. bias current of 68 mA.