Surface modification of oxide thin film and its gas-sensing properties

Authors
Tong, MS Dai, GR Gao, DS
Citation
Ms. Tong et al., Surface modification of oxide thin film and its gas-sensing properties, APPL SURF S, 171(3-4), 2001, pp. 226-230
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
171
Issue
3-4
Year of publication
2001
Pages
226 - 230
Database
ISI
SICI code
0169-4332(20010215)171:3-4<226:SMOOTF>2.0.ZU;2-S
Abstract
The SnO2-F2O3 thin him sensors with added platinum are studied. The gas-sen sing materials (Fe2O3 and SnO2) have been prepared from pentacarbonyl iron [Fe(CO)(5)] and tin tetrachloride (SnCl4) by plasma enhanced chemical vapor deposition method. In order to improve pas-sensing properties, the deposit ed films are dipped into an aqueous solution of H2PtCl6. 6H(2)O and heat-tr eated to form the Pt modified SnO2-Fe2O3 thin film sensors. The surface com position of the Pt modified thin films has been studied by means of X-ray p hotoelectron spectrum. The electrical properties of the prepared sensors an d the effect of Pt addition on the gas-sensing characteristics have also be en investigated. (C) 2001 Elsevier Science B.V. All rights reserved.