An organic functional group introduced to Si(111) via silicon-carbon bond:a liquid-phase approach

We report a new liquid-phase route for alkylation of a Si surface. A Cl-ter minated Si(1 1 1) surface was first prepared by UV-assisted chlorination of a H-terminated Si substrate in a PCl5 solution. Alkylation was accomplishe d by a reaction of the surface Si-Cl groups with n-C4H9Li under reflux cond ition. We have found that the C4H9-terminated surface exhibits a respectabl e stability in air. This alkylation technique is not only simple but also e ffective to reduce carbon and oxygen contamination. as compared to previous ly reported liquid-phase processes. The Si-C bonds thus formed expectedly s erve as a bridge between a rich variety in organic chemistry and advanced s ilicon technology. (C), 2001 Elsevier Science B.V. All rights reserved.