Initial oxidation process of Mg films was investigated by Anger electron sp
ectroscopy (AES), electron energy loss spectroscopy (EELS) and ultraviolet
photoelectron spectroscopy (UPS). A polycrystalline Mg film was exposed to
oxygen at room temperature. An inspection of EELS reveals that the initial
oxidation process could be classified according to the curve profile in the
low energy loss region. The oxide formation is initiated after oxygen expo
sure of 3 L (Langmuir). (C) 2001 Elsevier Science B.V. All rights reserved.