A general survey is presented on the structural modification of poly(methyl
methacrylate) (PMMA) by proton implantation. The implanted PMMA films were
characterized by FT-IR attenuated total reflection (FT-IR ATR), Raman, Rut
herford backscattering spectroscopy (RBS), gel permeation chromatography (G
PC) and surface profiling. The ion fluence of 350 keV protons ranged from 2
x 10(14) to 1 x 10(15) ions/cm(2). The IR and Raman spectra showed the red
uction of peaks from the pendant group of PMMA. The change of absorption an
d composition was observed by W-VIS and RES, respectively. These results sh
owed that the pendant group is readily decomposed and eliminated by proton
irradiation. The change of molecular weight distribution was also measured
by GPC and G-value of scission was estimated to be 0.67. (C) 2001 Elsevier
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