Effect of grain size of Pb(Zr0.3Ti0.6)O-3 sol-gel derived thin films on the ferroelectric properties

Lead zirconate titanate (PZT) (Zr/Ti = 40/60) thin films on Pt/SiO2/Si subs trate with greatly different grain size were attained well with controlled atomic composition and crystalline orientation by varying the starting solu tion composition and annealing time. Small and large grained films with (1 1 1)-preferred orientation were obtained and their grain sizes were approxi mately 110 and 370 nm, respectively. Since annealing treatment induced the alternation of microstructure and stress at the interface, the effect of gr ain size was discussed in a standpoint of microstructural characteristic. M easurements of ferroelectric and electric properties revealed that small gr ained film presents more gradual polarization behavior, less degradation of polarization through switching cycles, and lower leakage current density t han large grained film. (C) 2001 Elsevier Science B.V. All rights reserved.