Influence of preferred orientation of lead zirconate titanate thin film onthe ferroelectric properties

Lead zirconate titanate (PZT) thin films with highly (1 0 0)- and (1 1 1)-p referred orientation are obtained successfully through the control of botto m electrode orientation. The films are investigated in terms of the effect of crystalline orientation on the electric and ferroelectric properties and the microstructure. The differences in electrical properties between (1 0 0)- and (1 1 1)-preferred PZT films are discussed from the viewpoint of the relationship between external field and polarization direction. From the X RD patterns of before and after fatigue, the distortion of crystal structur e in (1 0 0)-preferred PZT was observed. From all the above results, we pro posed that the grains having (1 0 0) orientation are one of the causes of f atigue. (C) 2001 Elsevier Science B.V. All nights reserved.