Citation
Cc. Jaing et al., Making parabolic mirrors by electron-beam gun evaporation method with ion-assisted deposition, APPL SURF S, 169, 2001, pp. 654
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332
→ ACNP
Volume
169
Year of publication
2001
Database
ISI
SICI code
0169-4332(20010115)169:<654:MPMBEG>2.0.ZU;2-Z
Abstract
A spherical surface was modified to form a parabolic surface by the evapora
tion of Al2O3 films and an ion-assisted deposition process using a designed
mask. The stress of the evaporated films was measured by aphase shifting T
wyman-Green interferometer. Ion beam bombardment was proven to reduce the s
tress of Al2O3 films. The optimum ion beam voltage and ion beam current den
sity for reducing the film stress were 300 V and 16 muA/cm(2) for Al2O3 fil
ms. (C) 2001 Elsevier Science B.V. All rights reserved.