Arrays of microdischarge devices having 50-100 mu m square pyramidal Si anodes and screen cathodes

Authors
Park, SJ Chen, J Liu, C Eden, JG
Citation
Sj. Park et al., Arrays of microdischarge devices having 50-100 mu m square pyramidal Si anodes and screen cathodes, ELECTR LETT, 37(3), 2001, pp. 171-172
Citations number
7
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194 → ACNP
Volume
37
Issue
3
Year of publication
2001
Pages
171 - 172
Database
ISI
SICI code
0013-5194(20010201)37:3<171:AOMDH5>2.0.ZU;2-#
Abstract
Microdischarge devices having (50-100 mum)(2) pyramidal Si anodes and metal screen cathodes have been operated continuously at Ne gas pressures up to 1350Torr and voltages below 95V. More than 34 muW of output power is produc ed by a single device in a solid angle of similar to5 x 10(2)sr for a Ne pr essure of 500Torr. 3 x 3 arrays of these devices have been fabricated.