Single crystals of indium phosphide oriented in the [001] direction ha
ve been deformed by microhardness indentation. The surface topography
was observed by interferential optical microscopy and scanning electro
n microscopy in the secondary electron mode. The dislocation distribut
ion and their nature at the surface were investigated by scanning elec
tron microscopy in the cathodoluminescent mode and transmission electr
on microscopy. Both observations have led us to a better understanding
of the material now at the surface sample when it is indented.