Citation
Hy. Lee et al., GaAlAs-based micromachined accelerometer, HIGH PR RES, 19(1-6), 2000, pp. 737-741
Citations number
3
Categorie Soggetti
Physics
Journal title
HIGH PRESSURE RESEARCH
ISSN journal
08957959
→ ACNP
Volume
19
Issue
1-6
Year of publication
2000
Part
2
Pages
737 - 741
Database
ISI
SICI code
0895-7959(2000)19:1-6<737:GMA>2.0.ZU;2-F
Abstract
GaAlAs-based microstructures have been designed and realized in order to ta
ke advantage of their favorable intrinsic properties. Piezoresistive proper
ties were determined on macrostructures. Microfabrication process was estab
lished and first micro-accelerometers were produced.