Vertically coupled microring resonators using polymer wafer bonding

A new technique is presented to make vertically coupled semiconductor micro ring resonators that eases the fabrication process with devices more robust to ring-to-waveguide misalignments, Single-mode microring optical channel dropping filters are demonstrated for the first time in this configuration with es greater than 3000 and an on-resonance channel extinction greater th an 12 dB, A 1 x 4 multipiexer/demultiplexer crossbar array with second-orde r microrings was also made and exhibited channel-to-channel crosstalk lower than 10 dB.