Development of a compact single ion irradiation system

A compact single ion irradiation system has been developed to examine energ etic particle effects on materials and devices. The system has been constru cted by use of commercially available and inexpensive standard components a nd can be easily recomposed according to beam requirements for various irra diation experiments. The beam adjustment was automatically performed by hel p of a computer program based on a modified SIMPLEX method. The beam perfor mances of the system, i.e., pulse width, the number of ions included in one pulse and beam size were examined by use of a microchannel plate, a Si-SSD , a CCD image sensor and a CR-39 track detector, respectively. A beam of a single ion, 1 nsec in pulse width and several Irm in diameter has been succ essfully produced by this system.