Modeling and measurement of monomer pressure evolution in an inductively coupled pulsed plasma reactor for thin polymer films

A model has been developed to predict the evolution of monomer pressure ove r time in an inductively coupled plasma reactor. The model uses an analogou s electrical circuit to predict preplasma gas flow conditions. Based on the monomer pressure model, a relationship between pressure prior to electrica l discharge and the corresponding plasma polymerized acetylene deposition r ate mas measured experimentally, A plot of measured deposition rate versus preplasma monomer pressure was observed to have a relative maximum.