A determination of the electron distribution function near absorbing surfaces

A precise description of the electron distribution function near absorbing surfaces has been obtained based on the solution of the inhomogeneous elect ron Boltzmann equation. The absorbing surface creates a large gradient of t he electron distribution function that consequently leads to an axial varia tion of the electron density and other electron transport parameters, The a xial variation of the electron distribution function is investigated and co mpared for rare gases and nitrogen and the impact of the higher order terms in Legendre polynomial expansion is discussed.