Ion implantation and deposition on the inner surfaces of cylinders by exploding metallic foils

Authors
Citation
O. Demokan, Ion implantation and deposition on the inner surfaces of cylinders by exploding metallic foils, IEEE PLAS S, 28(5), 2000, pp. 1720-1724
Citations number
8
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
28
Issue
5
Year of publication
2000
Pages
1720 - 1724
Database
ISI
SICI code
0093-3813(200010)28:5<1720:IIADOT>2.0.ZU;2-V
Abstract
A novel scheme for ion deposition and possibly ion implantation on the inne r surfaces of cylindrical targets is proposed and experimentally tested. A large current is passed through a coaxial table-type structure, composed of a straight conductor and a thin metallic foil, surrounding it. The foil ev aporates and ionizes forming a metallic plasma, which is pushed radially ou tward due to the pressure of the magnetic field, confined to the region bet ween the plasma and the conductor. The ions of the foil material are observ ed to be deposited uniformly on the inner surface of a cylindrical target, enclosing this structure coaxially. Auger analysis on the target implies a possible implantation as well, but this implication needs to be supported b y further, extensive measurements, before a concrete statement can be made. The outcome of this pioneering experiment is far from being perfect, but i s encouraging. Suggestions for improving the quality of the outcome are mad e for this promising, single-shot deposition procedure.