Sputter deposited Ta thin films make excellent superconducting transition e
dge temperature sensors. Depending on film thickness, their transition temp
erature, Tc, ranges from 4.4K to as least as low as 0.5K. A figure of merit
of 50K(-1) is easily achieved. The films are mechanically extremely strong
, and at room temperature show minimal aging. Using a simple heat treatment
technique, T-c can be tuned to the desired operating range.