A subnanometre heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser

Authors
Yokoyama, T Araki, T Yokoyama, S Suzuki, N
Citation
T. Yokoyama et al., A subnanometre heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser, MEAS SCI T, 12(2), 2001, pp. 157-162
Citations number
8
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
MEASUREMENT SCIENCE & TECHNOLOGY
ISSN journal
09570233 → ACNP
Volume
12
Issue
2
Year of publication
2001
Pages
157 - 162
Database
ISI
SICI code
0957-0233(200102)12:2<157:ASHISW>2.0.ZU;2-1
Abstract
We present a high-resolution heterodyne interferometric system using a high -output-power, three-longitudinal-mode He-Ne laser. In this system, an inte rferometric wavelength of lambda /2 is synthesized with the super-heterodyn e detection of the three modes, resulting in twice the sensitivity for the target displacement in comparison with the conventional two-frequency inter ferometer. In the experiment, the achievement of subnanometre resolution ha s: been confirmed.