Diamond-like carbon films prepared by filtered are deposition for electronfield emission application

Authors
Mao, DS Li, W Wang, X Liu, XH
Citation
Ds. Mao et al., Diamond-like carbon films prepared by filtered are deposition for electronfield emission application, SURF COAT, 137(1), 2001, pp. 1-5
Citations number
17
Categorie Soggetti
Material Science & Engineering
Journal title
SURFACE & COATINGS TECHNOLOGY
ISSN journal
02578972 → ACNP
Volume
137
Issue
1
Year of publication
2001
Pages
1 - 5
Database
ISI
SICI code
0257-8972(20010301)137:1<1:DCFPBF>2.0.ZU;2-T
Abstract
In this paper, hydrogen-free diamond-like carbon (DLC) films were prepared by filtered are deposition. The effect of sp(3) content and annealing on el ectron field emission properties of the DLC films was studied. A patterned DLC flat thin film column emitter array was fabricated by oxygen reactive i on beam etching (RIBE) technique. Et was shown that the threshold field of the DLC films was approximately 3-15 V/mum. Field emission site density ran ged from 5 x 10(2) to 2 X 10(3) /cm(2). The field emission mechanism of the DLC films is also discussed. (C) 2001 Elsevier Science B.V. All rights res erved.