It is demonstrated that a gas discharge can be localized between separate e
lements on the surface of electrodes with a preset geometry. The main chara
cteristics of the localized discharge have been studied and the forms of th
is discharges are established. Using the localized discharge in a fluorine-
containing gas medium, size-controlled etching of silicon and silicon dioxi
de with a resolution of 100 mum was performed without mask application. (C)
2001 MAIK "Nauka/Interperiodica".