Subnanometer resolution in depth profiling using glancing Auger electrons

Authors
Drozdov, MN Danil'tsev, VM Drozdov, YN Khrykin, OI Shashkin, VI
Citation
Mn. Drozdov et al., Subnanometer resolution in depth profiling using glancing Auger electrons, TECH PHYS L, 27(2), 2001, pp. 114-117
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS LETTERS
ISSN journal
10637850 → ACNP
Volume
27
Issue
2
Year of publication
2001
Pages
114 - 117
Database
ISI
SICI code
1063-7850(2001)27:2<114:SRIDPU>2.0.ZU;2-T
Abstract
A new method for Auger depth profiling, employing a difference in the escap e depth of the Auger electrons emitted at nearly normal and glancing angles , is proposed and verified. The depth profiles obtained under optimum ion s puttering conditions with registration of the glancing Auger electrons exhi bit a subnanometer (0.8 nm) depth resolution. This technique was successful ly applied to the study of high-quality InxGa1 - xAs/GaAs heterostructures with quantum wells grown by the method of metalorganic chemical vapor depos ition. (C) 2001 MAIK "Nauka/Interperiodica".