Study of thin film multilayers using X-ray reflectivity and scanning probemicroscopy

We have presented new schemes to analyse grazing incidence specular X-ray r eflectivity data to obtain structural and chemical information of thin film s. Analysis of specular reflectivity data gives information along the depth of the film, whereas, analysis of non-specular data reveals the structural information across the film surface and interfaces. The schemes proposed a re based on the Born approximation and the distorted wave born approximatio n (DWBA). Surface structural parameters such as, height-height correlation and roughness exponent of the film obtained from the analysis of X-ray refl ectivity was compared with results obtained from atomic force microscopy (C ) 2001 Elsevier Science Ltd. All rights reserved.