During the past few years, there has been an increasing demand in the
field of precision engineering for fine motion in multi-degree of free
dom systems. These applications motivated the development of a new rob
otics field called microrobotics. In this paper, we review both the de
sign guidelines for microrobots and the advantages of using parallel r
obots in very high precision applications. Parallel micromanipulators
using elastic joints as well as structures manufactured in single soli
d and metallic bellows are introduced.