We have grown good-quality epitaxial LiNbO3 thin films on (0001) sapphire s
ubstrates using a pulsed laser deposition technique. The growth conditions
permitted us to deposit c-axis oriented films avoiding the problem of the L
iNb3O8 Li-deficient phase. The chemical composition of thin films was inves
tigated by secondary ion mass spectrometry and resulted to coincide with th
e target composition. Guided propagation was demonstrated at 632 and 488 nm
with thin films (similar to 1200 Angstrom). (C) 2001 American Institute of
Physics.