Chromium-doped aluminum nitride (AlN:Cr) films were grown on p-doped silico
n (111) by rf magnetron sputtering in a nitrogen atmosphere at a pressure o
f 10(-4) Torr. Film thickness was typically 200 nm. After growth, the films
were "activated" at similar to 1300 K for 30 min in a nitrogen atmosphere.
Films activated in this manner exhibit intense cathodoluminescence and pho
toluminescence emission. Spectral evidence demonstrates conclusively that t
he luminescent centers are Cr3+ ions. (C) 2001 American Institute of Physic
s.