Ba. Vojak et al., Multistage, monolithic ceramic microdischarge device having an active length of similar to 0.27 mm, APPL PHYS L, 78(10), 2001, pp. 1340-1342
A three-stage, multilayer ceramic microdischarge device, having an active l
ength of similar to 267 mum and a cylindrical discharge channel 140-150 mum
in diameter, has been developed and operated continuously in Ne gas. Stabl
e glow discharges are produced for pressures above 1 atm, operating voltage
s as low as 137 V (at 800 Torr), and specific power loadings of similar to
40 kW cm(-3). The V-I characteristics for a fired ceramic structure exhibit
a negative resistance, whereas the resistance is positive prior to firing.
The manufacturability of the fabrication process as well as the "flow-thro
ugh" and multistage design of this device make it well suited for the excit
ation of gas microlasers or the dissociation of toxic or environmentally ha
zardous gases and vapors. (C) 2001 American Institute of Physics.