Ablation of cobalt with pulsed UV laser radiation

Citation
Tj. Li et al., Ablation of cobalt with pulsed UV laser radiation, APPL SURF S, 172(3-4), 2001, pp. 356-365
Citations number
21
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
172
Issue
3-4
Year of publication
2001
Pages
356 - 365
Database
ISI
SICI code
0169-4332(20010315)172:3-4<356:AOCWPU>2.0.ZU;2-C
Abstract
The ablation of cobalt with 20 ns pulses of 308 nm XeCl excimer laser radia tion is investigated. The dependence of the ablation rate on laser fluence, spot area, and pulse number is determined. The experimental results are co mpared with a numerical calculation based on an improved thermal model. The model, which considers proper vapor attenuation, is shown to be in good ag reement with experiment. (C) 2001 Elsevier Science B.V. All rights reserved .