Ablation of cobalt with pulsed UV laser radiation
Citation
Tj. Li et al., Ablation of cobalt with pulsed UV laser radiation, APPL SURF S, 172(3-4), 2001, pp. 356-365
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
SICI code
0169-4332(20010315)172:3-4<356:AOCWPU>2.0.ZU;2-C
Abstract
The ablation of cobalt with 20 ns pulses of 308 nm XeCl excimer laser radia
tion is investigated. The dependence of the ablation rate on laser fluence,
spot area, and pulse number is determined. The experimental results are co
mpared with a numerical calculation based on an improved thermal model. The
model, which considers proper vapor attenuation, is shown to be in good ag
reement with experiment. (C) 2001 Elsevier Science B.V. All rights reserved
.