This paper presents a novel three-demensional (3-D) thermal simulation tool
for semiconductor integrated devices. The simulator is used to automatical
ly generate an accurate 3-D physical model of the device to be simulated fr
om layout information. The simulator produces an appropriate mesh of the de
vice based on a rectangular block structure. The mesh is automatically crea
ted such that a fine mesh Is produced around heat generation regions, but a
moderate number of blocks are used for the entire device.
This paper first confirms that the simulator produces an accurate solution
to the nonlinear differential equation describing the heat flow. Then model
generation from three example technologies (silicon trench, GaAs mesa stru
ctures, silicon on insulator) is presented. The potential of the simulator
to quickly and easily explore the effect of layout and process variations i
s illustrated, with the simulation of a two-transistor GaAs power cell as a
large example.
The program incorporates a transient solver based on a transmission line ma
trix (TLM) implementation using a physical extraction of a resistance and c
apacitance network. The formulation allows for temperature dependent materi
al parameters and a nonuniform time stepping. An example of a full transien
t solution of heat flow in a realistic Si trench device is presented.