Characterization of embedded spiral inductors in co-fired ceramic substrates

Embedded planarized inductors can be fabricated using the low-temperature c o-fired ceramic technique. Larger inductance is obtained when using a spira l pattern, because the mutual inductance between adjacent conductors has a positive sign. In addition, because of their simple geometry and easy fabri cation, spiral-type inductors are widely used. For embedded five- and ten-t urn spiral coils, the inductances of about 0.3 and 1.2 muH were obtained, r espectively. The value of inductance was almost unchanged in the frequency range between 500 kHz and 40 MHz. The quality factor reaches a peak with in creasing frequency and then falls. The peak values (about 10 MHz) of the fi ve- and ten-turn spiral coils are about 20 and 32, respectively.