Scanning tunnelling microscope (STM) modifications on alpha -WO3-x thin fil
ms were carried out in air. Holes and bumps were produced. Two mechanisms w
ere clarified with respect to the water layer attached mon or less in modif
ications. By applying voltage pulses, the high humidity (>60%) raised the p
robability of hole formations. Connection lines were formed between the hol
es, confirming a dominant electrochemical nature. The low humidity (<20%) r
aised the probability of bump formations. Similar heights in both STM and a
tomic force microscopy (AFM) images imply a physical transformation in the
process. Depressed sides near the bumps strongly manifested the diffusion o
f surface molecules: to the tip induced by the electric field gradient. In
the intermediate humidity (20-60%), there was a higher voltage threshold fo
r bump formations than for. hole formations, as well as for positive voltag
e pulses than for negative voltage pulses. The discrepancies were reasonabl
y attributed to the different tip-sample distances and the consequently ind
uced electric fields.