Y. Fujisaki et H. Ishiwara, Damage-free and hydrogen-free nitridation of silicon substrate by nitrogenradical source, JPN J A P 2, 39(11A), 2000, pp. L1075-L1077
New damage free nitridation process of a silicon substrate is proposed with
the use of a nitrogen radical source. The process also realized the hydrog
en-free film that ensured high resistance against high temperature oxidatio
n processes. It was also found that thicker than 3 nm films could be synthe
sized at room temperature using atomic N radicals. The metal insulator semi
conductor (MIS) diode composed of radical nitride Si3N4 shows no hysteresis
in capacitance voltage characteristics even after the annealing at 950 deg
reesC. It was demonstrated that the application of Si3N4 films to the most
advanced field effect transistors became much easier than the conventional
processes with the use of radical nitridation.