A model for phonon heat conduction in a semiconductor nanowire with dimensi
ons comparable to the phonon mean free path is developed. It is based on th
e solution of Boltzmann's equation, which takes into account (i) modificati
on of the acoustic phonon dispersion due to spatial confinement, and (ii) c
hange in the nonequilibrium phonon distribution due to partially diffuse bo
undary scattering. Numerical simulation is performed for a silicon nanowire
with boundaries characterized by different interface roughness. Phonon con
finement and boundary scattering lead to a significant decrease of the latt
ice thermal conductivity. The value of this decrease and its interface roug
hness and temperature dependence are different from the predictions of the
early models. The observed change in thermal resistance has to be taken int
o account in simulation of deep-submicron and nanometer-scale devices. (C)
2001 American Institute of Physics.