(Ba0.5Sr0.5)TiO3 ferroelectric thin films were prepared by Sol-Gel processi
ng. Films with thickness of 160nm treated at 700 degreesC for 1h showed pur
e perovskite structure and good dielectric, insulating properties, i.e. a d
ielectric constant of 225, a dielectric loss of 0.044, a leakage current de
nsity of 8.0x10(-8)A/cm(2). The leakage current density was found to depend
on the annealing temperature. The measurement of the J-V characteristics o
n films indicated the conduction process to be bulk-limited.