Evaluation of outgassing compounds from cleanroom construction materials

The control of organic outgassing from cleanroom construction materials is becoming stricter as semiconductor device geometries continue to shrink. In this article, a dynamic headspace sampling technique coupled with gas chro matography-mass spectrometry (GC-MS) was studied for evaluating cleanroom c onstruction materials. With this method, the outgassing amount increases li nearly with increasing sampling time. The outgassing rate is determined fro m the slope of this curve. The logarithm of the outgassing rate shows a lin ens relation with a reciprocal number of the absolute temperature of outgas sing. By using this relationship,the outgassing rate of materials at temper atures of interest can be estimated from the available data.