Local optimization of surface-relief profiles of diffractive high-numerical
-aperture imaging lenses is considered in the 1:1 imaging geometry for both
linearly polarized illumination and unpolarized illumination by using the
transition points of a four-level grating as design parameters. In the imag
ing geometry the optimized surface profiles differ considerably from those
optimized previously for focusing or collimation geometries. Binary surface
-relief grating structures are shown to provide high local diffraction effi
ciencies (up to 95%) in the outer regions of a high-numerical-aperture diff
ractive imaging lens because of the near-Littrow configuration. (C) 2001 Op
tical Society of America.