The low temperature phase of betaine phosphate was investigated by X-ray di
ffraction. The intensity of the X-ray diffraction at 20 K was measured and
analyzed to determine the crystal structure. The least-squares method conve
rged at the R factor 4.6% with 3349 reflections (4.2% for 2081 normal refle
ctions and 8.4% for 1268 superlattice reflections). The structure analysis
clarified that the protons (the hydrogen atoms of the phosphate origin) bet
ween neighboring phosphate tetrahedrons were in order in the low temperatur
e phase causing the super structure of cell-doubling. The temperature depen
dence of superlattice reflections was measured and a kink was found corresp
onding to the intermediate phase between 76 K and 85 K.