Investigations of crystallinity and residual stress of cubic boron nitridefilms by Raman spectroscopy - art. no. 073201

With a spatial correlation model, a simple method was established to evalua te the crystallinity and stress of cubic boron nitride (cBN) films from the variation of linewidth and peak shift of Raman spectra. An increase of cry stallinity and a decrease of stress of the cBN films with growth time were demonstrated. As a reference, the Raman spectra of cBN single crystals synt hesized by a high-pressure, high-temperature method were also investigated. Our cBN film deposited for 1 h revealed a low stress of about 1 GPa and a comparable crystallinity to that of 4-8 mum commercially available cBN sing le crystals.