Fm. Dias et al., A laser photodetachment technique for the measurement of H- in a high frequency traveling wave discharge, REV SCI INS, 72(3), 2001, pp. 1680-1687
A probe based laser photodetachment system has been developed to measure th
e H- density in a high frequency hydrogen discharge sustained by a travelin
g surface wave. Problems associated with application of this technique in h
igh frequency discharges in general are pointed out. The influence of the t
ime varying voltage across the plasma probe sheath on the probe measurement
has been minimized by applying a passive method of compensation. An emissi
ve probe, placed inside the launcher, has been used as a reference electrod
e in order to minimize the discharge disturbance and to reduce the addition
al resistance in the measuring system. A filtering technique has been incor
porated in the detection system to separate the photodetachment signal from
the signal at the discharge stimulating frequency. The big heating of the
probe, set at electron saturation condition, has been avoided by using a co
nvenient time sequence of the detection system operation. The photodetachme
nt H- density measurements are confirmed by applying a high sensitivity sec
ond derivative probe technique as a second reference method. Axial variatio
n of H- density, as measured, correlates with the axial distribution of hyd
rogen atoms. Experimentally obtained radial H- density profile confirms the
well known fact that the negative ions are confined in the existing radial
potential well. (C) 2001 American Institute of Physics.