Ip. Soshnikov et al., Composition analysis of coherent nanoinsertions of solid solutions on the basis of high-resolution electron micrographs, SEMICONDUCT, 35(3), 2001, pp. 347-352
A program package is presented, ensuring fast direct and inverse Fourier tr
ansformations of images, various methods of noise filtration and use of spe
ctral windows, and determination of local interplanar spacings (LIS) from c
ross-sectional high-resolution electron micrographs. The algorithm for dete
rmining the LIS consists in obtaining, by double fast Fourier transformatio
n, a high-resolution image filtered by selecting an appropriate combination
of reflections and using this image to find the characteristic LIS. A spec
ific feature of this algorithm is that it employs weighting with correction
of the integration domain. The resulting maps of LIS can be used to determ
ine the chemical composition, e.g., in substitutional solid solutions, such
as A(x)B(1-x), A(x)B(1-x)C. The method is applied to process a high-resolu
tion electron micrograph of a heterostructure with a submonolayer InGaAs/Ga
As lattice. (C) 2001 MAIK "Nauka /Interperiodica".