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SiC characterization techniques: Specificity of optical and electrical properties
Authors
Camassel, J
Contreras, S
Citation
J. Camassel et S. Contreras, SiC characterization techniques: Specificity of optical and electrical properties, VIDE, 55(298), 2000, pp. 429
Citations number
67
Categorie Soggetti
Material Science & Engineering
Journal title
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
ISSN journal
12660167 →
ACNP
Volume
55
Issue
298
Year of publication
2000
Database
ISI
SICI code
1266-0167(2000)55:298<429:SCTSOO>2.0.ZU;2-R
Abstract
The purpose of this paper is to review the standard optical and electrical techniques used for SiC characterization. We focus on the specific effect o f polytypism.