The formation and ionization energies of impurities in cubic silicon nitrid
e are investigated through first-principles calculations. Among the element
s in the groups III to VI, P and O are preferable for n-type doping, while
Al is favorable for p-type doping in terms of the formation and ionization
energies. The compensation of doped carriers associated with the incorporat
ion of these impurities into anti and interstitial sites can be suppressed
if appropriate growth conditions are chosen. (C) 2001 American Institute of
Physics.