Analysis of realistic large MEMS devices

Authors
Ljung, P Bachtold, M Spasojevic, M
Citation
P. Ljung et al., Analysis of realistic large MEMS devices, CMES-COMP M, 1(1), 2000, pp. 21-30
Citations number
20
Categorie Soggetti
Computer Science & Engineering
Journal title
CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES
ISSN journal
15261492 → ACNP
Volume
1
Issue
1
Year of publication
2000
Pages
21 - 30
Database
ISI
SICI code
1526-1492(2000)1:1<21:AORLMD>2.0.ZU;2-0
Abstract
This paper presents AutoMEMS(R), a numerical simulation environment to effi ciently analyze the behavior of large real-world MEMS designs. By automatin g surface-based model generation, meshing and field solver tools, it is pos sible to rapidly model large complex MEMS devices.