A methodology and associated CAD tools for support of concurrent design ofMEMS

Development of micro-electro-mechanical systems (MEMS) products is currentl y hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of microsystems requires a top-down approach to system design which, in turn, requires des igners from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a me thodology and tool-set which directly support such an integrated design pro cess.