The minority electron diffusion length, L, in Mg-doped molecular beam epita
xy (MBE) grown p-type AlxGa1-xN/GaN superlattices with aluminum content x =
0.1 and 0.2 was measured perpendicular and parallel to the superlattice pl
anes by the electron beam induced current (EBIC) technique. A large anisotr
opy in the transport properties was observed with the effect varying from 1
: 3 to 1 : 6. We attribute an experimentally observed diffusion length ani
sotropy to minority electron scattering during transport across the potenti
al barriers of the superlattice. Reference p-GaN samples were also investig
ated, and the diffusion length was observed to be isotropic in both metal o
rganic chemical vapor deposition (MOCVD) (L = 0.5 mum) and MBE (L = 0.27 mu
m) grown samples.