Local levels with a large activation energy E-alpha similar to 0.8-1.0 eV h
ave been observed in low-frequency noise measurements of GaN/AlGaN heterost
ructure field effect transistors (HFETs and MOS-HFETs) grown on 4H-SiC subs
trates. The noise might come from thin (30 nm) AlGaN barrier layer The esti
mates of the level parameters based on this assumption resulted in reasonab
le values of capture cross section sigma (n) approximate to (10(-12) - 10(-
13)) cm(2) and trap concentration N-t approximate to 5 x 10(16) cm(-3).