Laserannealing studies of barium strontium titanate thin films using shortlaser pulses

Laser annealing studies on CSD derived (Ba.Sr)TiO3 thin films were performe d using a KrF-Excimer laser emitting light at a wavelength of lambda =248nm with pulse duration of tau =20ns. The pulse energies and the number of pul ses within one crystallization process were varied over a range of 10mJ/cm( 2) to 200mJ/cm(2) and 10 to 10000 pulses. The appearance of crystallization was identified using microstructural analytical methods. The crystallizati on depth obtained was in the range of 30-150nm. Several different kinds of damage were identified depending on the laser and deposition parameters. Th e experimental results are interpreted by modeling of the heat distribution in the material using finite element method.