Preparation of (PbxBa1-x)TiO3 thin films by MOCVD using an aerosol-assisted liquid delivery system

Thin films of PbTiO3, BaTiO3 and (PbxBa1-x)TiO3 (PBT) have been prepared by metal-organic chemical vapor deposition using a horizontal reactor with an aerosol-assisted liquid delivery system. Structural and electrical propert ies have been investigated as a function of the lead content x. First resul ts on PET thin films grown on platinized silicon substrates show, for x > 0 .8, an increasing tetragonal distortion of the lattice cell (c/a >1), and a ccompanying ferroelectric behavior which is similar to the bulk material. F or smaller lead content (x < 0.8) no ferroelectric behavior is established and a small tetragonal distortion of opposite type (c/a <1) is observed. Th is distortion is attributed to a thermally induced tensile film stress and may be responsible For the suppression of the ferroelectric phase transitio n.