A. Gonzalez et al., Glycolate tantalum based solutions for the sol-gel spin-coating depositionof SrBi2Ta2O9 thin films, INTEGR FERR, 30(1-4), 2000, pp. 281-289
The reaction of tantalum ethoxide with a glycol solvent produces the interc
hange of the ethoxide groups with the glycol. As a result, a polymeric deri
vative is formed with a high resistance towards hydrolysis. Compounds of Sr
(II) and Bi(II) can be added to this Ta-glycol sol, leading to strontium bi
smuth tantalate (SBT) precursor solutions stable in air. These solutions we
re spin-coated onto two substrates: Pt/TiO2/SiO2/(100)Si and Ti/Pt/Ti/SiO2/
(100)Si. Crystallisation of the SET phase was carried out by a first format
ion of a fluorite phase that evolves to the layered perovskite at temperatu
res over 600 degreesC. During crystallisation, a larger tendency to the for
mation of a substrate/film interface was observed in the films deposited on
to Ti/Pt/Ti/SiO2/(100)Si than onto Pt/TiO2/SiO2/(100)Si, A remanent polaris
ation of P-r>5 muC/cm(2) and a coercive field of E-c<100 kV/cm were measure
d in the films on Pt/TiO2/SiO2/(100)Si. These films retain its remanent pol
arisation, P-r, up to 10(5)seconds and are fatigue-free up to 10(9) cycles.